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Title:
PHOTOELECTRIC DETECTOR HAVING LIGHT-SPLITTING STRUCTURE AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/087376
Kind Code:
A1
Abstract:
A photoelectric detector having a light-splitting structure, comprising: a chip, a first annular electrode (6), a second annular electrode (7), electrode leads (6-1, 7-1), a beam-splitting prism (1), and reflective structures (2-1, 2-2). The chip is a convex structure; the beam-splitting prism (1) and the first annular electrode (6) are provided above a convex part of the chip, and the beam-splitting prism (1) is located in the center of the first annular electrode (6); the second annular electrode (7) and the reflective structures (2-1, 2-2) are placed in an outer concave part of the chip; visible light vertically enters from the top of the chip after passing through the beam-splitting prism (1), and near-infrared light is totally reflected on the reflective structures (2-1, 2-2) by passing through the beam-splitting prism (1), reflected twice by passing through the reflective structures (2-1, 2-2), and then horizontally enters from the side of the convex part of the chip. By using a means of separating visible light and near-infrared light by using a light-splitting structure, light in spectral bands enter respective depths of complete absorption, which balances the problem of mutual contradiction between the response speed and quantum efficiency of visible light and near-infrared light for the thickness of an absorption layer. Thus, the effects of high efficiency and quick response of light having a wide spectrum is achieved.

Inventors:
WANG WEIBIAO (CN)
GUO GUANGTONG (CN)
LIANG JINGQIU (CN)
TAO JIN (CN)
LV JINGUANG (CN)
CHEN WEISHUAI (CN)
LI XIANGLAN (CN)
QIN YUXIN (CN)
Application Number:
PCT/CN2021/133893
Publication Date:
May 25, 2023
Filing Date:
November 29, 2021
Export Citation:
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Assignee:
CHANGCHUN INST OPTICS FINE MECH & PHYSICS CAS (CN)
International Classes:
H01L31/18; H01L31/0232; H01L31/101; H01L31/105
Foreign References:
CN109155340A2019-01-04
CN110165012A2019-08-23
CN112490305A2021-03-12
CN106129168A2016-11-16
CN105742397A2016-07-06
US20080237771A12008-10-02
Attorney, Agent or Firm:
CC INTELLECTUAL PROPERTY LAW FIRM (CN)
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