PHOTON-COUNTING TYPE RADIATION DETECTOR AND RADIATION EXAMINATION DEVICE USING SAME

Title:

PHOTON-COUNTING TYPE RADIATION DETECTOR AND RADIATION EXAMINATION DEVICE USING SAME

Document Type and Number:

WIPO Patent Application WO/2020/085214

Kind Code:

A1

Abstract:

This photon-counting type radiation detector has a cell structure comprising a substrate and an epitaxial layer which is provided on the substrate and on which radiation rays are incident, wherein the inclination θ (°) of the substrate is within a prescribed range when tsub is the thickness of the substrate, tepi is the thickness of the epitaxial layer, L is the length of the substrate, and θ is the inclination of the substrate with respect to the irradiation direction of the X rays. The epitaxial layer is preferably one selected from SiC, Ga2O3, GaAs, GaN, diamond, and CdTe. Such a photon-counting type radiation detector is suitable for a direct conversion type.

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Inventors:

KAKUSHIMA KUNIYUKI (JP)
SASAKI AKITO (JP)
SASAKI ATSUYA (JP)
HIRABAYASHI HIDEAKI (JP)

Application Number:

PCT/JP2019/040962

Publication Date:

April 30, 2020

Filing Date:

October 17, 2019

Export Citation:

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Assignee:

TOSHIBA KK (JP)
TOSHIBA MATERIALS CO LTD (JP)

International Classes:

G01T1/24; H01L31/08

Domestic Patent References:

WO2012086648A1

2012-06-28

Foreign References:

JPS54121817A	1979-09-21
JP2012517604A	2012-08-02
JPH09275223A	1997-10-21
JPS6340381A	1988-02-20
JP2014160042A	2014-09-04
JP4886151B2	2012-02-29
JPS6340381A	1988-02-20

Other References: