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Title:
PHOTORESIST BAKING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/041496
Kind Code:
A1
Abstract:
A photoresist baking device comprises a baking chamber (1) having an air inlet (2) and an air outlet (3), and an upper cover (11) connected to and sealing the baking chamber (1). The upper cover (11) is used to guide hot air that has entered the baking chamber (1). The upper cover (11) is further provided with a heating device (4) to maintain a temperature of the hot air. In the invention, a heating device (4) provided at an upper cover (11) can heat hot air blown toward the upper cover (11), such that the hot air has a constant temperature when flowing toward an air outlet (3), thereby preventing a volatile substance of the photoresist from condensing and dripping due to a temperature change after touching the upper cover (11).

Inventors:
CHEN, Chung-jen (No. 9-2, Tangming Road Gongming Street, Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
LIN, Ming-wen (No. 9-2, Tangming Road Gongming Street, Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
LI, Yan-ze (No. 9-2, Tangming Road Gongming Street, Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
WU, Chilin (No. 9-2, Tangming Road Gongming Street, Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
WU, Zhikun (No. 9-2, Tangming Road Gongming Street, Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
Application Number:
CN2017/107512
Publication Date:
March 07, 2019
Filing Date:
October 24, 2017
Export Citation:
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Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. (No. 9-2, Tangming Road Gongming Street, Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
International Classes:
F26B23/06; F26B25/10
Foreign References:
CN203798088U2014-08-27
CN106971938A2017-07-21
TW200743771A2007-12-01
CN103472610A2013-12-25
TW201321696A2013-06-01
Attorney, Agent or Firm:
MING & YUE INTELLECTUAL PROPERTY LAW FIRM (Room 604, Building 2 Oceanwide City Square, Qianhai Road, Nanshan Street, Nanshan Distric, Shenzhen Guangdong 6, 518066, CN)
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