Title:
PHOTOSENSOR SUBSTRATE AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2016/104339
Kind Code:
A1
Abstract:
This photosensor substrate (10) is provided with a plurality of sensor parts (1). Each sensor part (1) comprises a switching element (2), a lower electrode (3) that is connected to the switching element (2), and a photoelectric conversion element (4). This photosensor substrate (10) is also provided with: wiring lines (G, D) which are connected to respective switching elements of the plurality of sensor parts, and are led out to the outside of a sensor area (SA); and terminal parts (TG, TD) which are connected to the wiring lines (G, D) led out from the sensor area (SA). Each terminal part (TG, TD) comprises: a protective layer (4a) that is provided over the wiring line (G, D) led out from the sensor area and contains a material that is used in the photoelectric conversion element (4); and a terminal conductor (6) that is connected to the wiring line (G, D) through an opening (CH1) that is provided in the protective layer (4a).
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Inventors:
TOMYO ATSUSHI
MIYAMOTO TADAYOSHI
TOMIYASU KAZUHIDE
ITO KAZUATSU
MIYAMOTO TADAYOSHI
TOMIYASU KAZUHIDE
ITO KAZUATSU
Application Number:
PCT/JP2015/085411
Publication Date:
June 30, 2016
Filing Date:
December 17, 2015
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L27/146; H01L21/3205; H01L21/768; H01L23/522; H01L27/144; H04N5/32; H04N5/369
Foreign References:
JP2007049123A | 2007-02-22 | |||
JP2013077788A | 2013-04-25 | |||
JP2011159782A | 2011-08-18 | |||
JP2009043826A | 2009-02-26 | |||
JPH10214955A | 1998-08-11 | |||
JP2013232658A | 2013-11-14 | |||
JP2007329433A | 2007-12-20 |
Attorney, Agent or Firm:
KAWAKAMI Keiko et al. (JP)
Keiko Kawakami (JP)
Keiko Kawakami (JP)
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