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Patent Searching and Data


Title:
PHOTOVOLTAIC DEVICES AND METHOD OF MANUFACTURING
Document Type and Number:
WIPO Patent Application WO/2017/100393
Kind Code:
A3
Abstract:
Disclosed are methods for the surface cleaning and passivation of PV absorbers, such as CdTe substrates usable in solar cells, and devices made by such methods. In some embodiments, the method involves an anode layer ion source (ALIS) plasma discharge process to clean and oxidize a CdTe surface to produce a thin oxide layer between the CdTe layer and subsequent back contact layer(s).

Inventors:
JIN CHANGMING (US)
LEE SANGHYUN (US)
ZHANG JUN-YING (US)
Application Number:
PCT/US2016/065511
Publication Date:
July 13, 2017
Filing Date:
December 08, 2016
Export Citation:
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Assignee:
FIRST SOLAR INC (US)
International Classes:
H01L31/073; H01L21/02; H01L31/18; H01J27/14; H01J37/32; H01L31/0392
Foreign References:
US20090078318A12009-03-26
US20100311203A12010-12-09
US20140273334A12014-09-18
US5393675A1995-02-28
EP1160880A22001-12-05
Other References:
VISWANATHAN V ET AL: "RF sputter etch as a surface cleaning process for CdTe solar cells", CONFERENCE RECORD OF THE THIRTY-FIRST IEEE PHOTOVOLTAIC SPECIALIST CONFERENCE (IEEE CAT. NO. 05CH37608) IEEE PISCATAWAY, NJ, USA, IEEE, 3 January 2005 (2005-01-03), pages 426 - 429, XP010822738, ISBN: 978-0-7803-8707-2, DOI: 10.1109/PVSC.2005.1488160
DUDNIKOV V ET AL: "Ion source with closed drift anode layer plasma acceleration", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 73, no. 2, 1 February 2002 (2002-02-01), pages 729 - 731, XP012039693, ISSN: 0034-6748, DOI: 10.1063/1.1431703
KRISHNAMURTHY V ET AL: "OXIDE INTERFACIAL LAYERS IN AU OHMIC CONTACTS TO P-TYPE HG1-XCDX TE", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, vol. 56, no. 10, 5 March 1990 (1990-03-05), pages 925 - 927, XP000133493, ISSN: 0003-6951, DOI: 10.1063/1.102627
Attorney, Agent or Firm:
BRAINARD, Thomas, D. (US)
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