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Patent Searching and Data


Title:
PHYSICAL QUANTITY MEASURING APPARATUS AND SIGNAL PROCESSING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2008/032741
Kind Code:
A1
Abstract:
A physical quantity measuring apparatus and a signal processing method thereof wherein noise components can be reduced to improve the reliability without increasing the circuit scale and the cost. A physical quantity determining part (11) has a signal detecting means that detects a plurality of signals based on a desired physical quantity to determine the desired physical quantity. A signal processing part (12) performs a signal processing for linear combining the signals, which are detected by the physical quantity determining part (11) with respect to the detection axes, by use of a combination that varies with time. An arithmetic processing part (13) uses the signal data outputted by the signal processing part (12) to perform combinational arithmetic of the plurality of signals based on the physical quantity associated with the physical quantity determining part (11). Thus, the signals detected from the plurality of detection axes are linear combined by use of the combination that varies with time and then subjected to the arithmetic process, thereby obtaining desired signal components in which the noise components have been reduced.

Inventors:
YAMASHITA MASAYA (JP)
KITAMURA TORU (JP)
KITAURA MUNEHIRO (JP)
Application Number:
PCT/JP2007/067743
Publication Date:
March 20, 2008
Filing Date:
September 12, 2007
Export Citation:
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Assignee:
ASAHI KASEI EMD CORP (JP)
YAMASHITA MASAYA (JP)
KITAMURA TORU (JP)
KITAURA MUNEHIRO (JP)
International Classes:
G01D3/028; G01D3/036; G01P15/18; G01R33/02; G01R33/07; H01L43/06
Foreign References:
US6278271B12001-08-21
JPH08210855A1996-08-20
JPH07151842A1995-06-16
JP2005065789A2005-03-17
JP2005065789A2005-03-17
JP2002071381A2002-03-08
JP2001004408A2001-01-12
JP2005283503A2005-10-13
US6278271B12001-08-21
Other References:
See also references of EP 2060875A4
Attorney, Agent or Firm:
TANI, Yoshikazu (Akasaka 2-chomeMinato-k, Tokyo 52, JP)
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