Title:
PHYSICAL QUANTITY SENSOR AND PHYSICAL QUANTITY DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2013/008263
Kind Code:
A1
Abstract:
The purpose of the present invention is to, in a physical quantity sensor having a sensor configuration with a plurality axes, obtain, with higher accuracy or at lower cost, a configuration in which a conversion unit and the like are shared among the plurality of axes. To achieve this purpose, the physical quantity sensor employs the following configuration.
That is, voltages encoded by codes orthogonal to each other are applied to a plurality of detection elements (5) that respond to different physical quantities, and the output voltages from the detection elements are digitized by an identical conversion unit (10). Subsequently, a plurality of decoding units (9) decode the digitized signals by the codes corresponding to the respective detection elements.
Inventors:
MAEDA DAISUKE (JP)
OSHIMA TAKASHI (JP)
NAKAGAWA TATSUO (JP)
ISOBE ATSUSHI (JP)
OSHIMA TAKASHI (JP)
NAKAGAWA TATSUO (JP)
ISOBE ATSUSHI (JP)
Application Number:
PCT/JP2011/003918
Publication Date:
January 17, 2013
Filing Date:
July 08, 2011
Export Citation:
Assignee:
HITACHI LTD (JP)
MAEDA DAISUKE (JP)
OSHIMA TAKASHI (JP)
NAKAGAWA TATSUO (JP)
ISOBE ATSUSHI (JP)
MAEDA DAISUKE (JP)
OSHIMA TAKASHI (JP)
NAKAGAWA TATSUO (JP)
ISOBE ATSUSHI (JP)
International Classes:
G01P15/125; B81B3/00; G01C19/56; G01P15/18
Foreign References:
| JP2006084400A | 2006-03-30 | |||
| JP2003215156A | 2003-07-30 | |||
| JP2004286581A | 2004-10-14 | |||
| JP2007322295A | 2007-12-13 | |||
| JP2011038872A | 2011-02-24 | |||
| JP2006093887A | 2006-04-06 | |||
| JP2002536870A | 2002-10-29 | |||
| JP2009005103A | 2009-01-08 | |||
| US5537083A | 1996-07-16 | |||
| JP2010101737A | 2010-05-06 | |||
| JP2007240518A | 2007-09-20 |
Other References:
PAAVOLA M.; KAMARAINEN M.; JARVINEN J.A.M.; SAUKOSKI M.; LAIHO M; HALONEN K.A.I.: "A Micropower Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer", SOLID-STATE CIRCUITS, IEEE JOURNAL OF, vol. 42, no. 12, December 2007 (2007-12-01), pages 2651 - 2665
See also references of EP 2730928A4
See also references of EP 2730928A4
Attorney, Agent or Firm:
INOUE, Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
Download PDF:
Claims:
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