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Title:
PHYSICAL QUANTITY SENSOR AND MANUFACTURING METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2012/014792
Kind Code:
A1
Abstract:
[Problem] To provide a physical quantity sensor that is superior both in terms of hermetic qualities and electrical stability. [Solution] Formed on the back surface (8a) of the frame body portion (8) of a sensor substrate (26) are a first encapsulation layer (56) formed in a frame shape, and a first contact layer (57) that is set apart from the first encapsulation layer (56), penetrates a functional member (9) and an insulating layer (25), and is electrically connected to the functional member (9) and a first substrate (10). On the front surface of a wiring substrate (30) are formed a second encapsulation layer (65) that is formed in a position facing the first encapsulation layer, and a second contact layer (66) that is set apart from the second encapsulation layer (65), penetrates an insulating layer (30b), and is electrically connected to a second substrate (30a). The encapsulation layers (56, 65) are eutectically bonded. The contact layers (57, 66) are electrically connected, and the first substrate (10), the second substrate (30a), and the frame body portion (8) have the same potential.

Inventors:
UTO, Yoshitaka (1-7, Yukigaya-otsukamachi, Ota-k, Tokyo 01, 〒1458501, JP)
宇都 宜隆 (〒01 東京都大田区雪谷大塚町1番7号 アルプス電気株式会社内 Tokyo, 〒1458501, JP)
MIYATAKE, Akira (1-7, Yukigaya-otsukamachi, Ota-k, Tokyo 01, 〒1458501, JP)
宮武 亨 (〒01 東京都大田区雪谷大塚町1番7号 アルプス電気株式会社内 Tokyo, 〒1458501, JP)
TAKAHASHI, Toru (1-7, Yukigaya-otsukamachi, Ota-k, Tokyo 01, 〒1458501, JP)
高橋 亨 (〒01 東京都大田区雪谷大塚町1番7号 アルプス電気株式会社内 Tokyo, 〒1458501, JP)
KOBAYASHI, Toshihiro (1-7, Yukigaya-otsukamachi, Ota-k, Tokyo 01, 〒1458501, JP)
Application Number:
JP2011/066656
Publication Date:
February 02, 2012
Filing Date:
July 22, 2011
Export Citation:
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Assignee:
ALPS ELECTRIC CO., LTD. (1-7 Yukigaya-otsukamachi, Ota-ku Tokyo, 01, 〒1458501, JP)
アルプス電気株式会社 (〒01 東京都大田区雪谷大塚町1番7号 Tokyo, 〒1458501, JP)
UTO, Yoshitaka (1-7, Yukigaya-otsukamachi, Ota-k, Tokyo 01, 〒1458501, JP)
宇都 宜隆 (〒01 東京都大田区雪谷大塚町1番7号 アルプス電気株式会社内 Tokyo, 〒1458501, JP)
MIYATAKE, Akira (1-7, Yukigaya-otsukamachi, Ota-k, Tokyo 01, 〒1458501, JP)
宮武 亨 (〒01 東京都大田区雪谷大塚町1番7号 アルプス電気株式会社内 Tokyo, 〒1458501, JP)
TAKAHASHI, Toru (1-7, Yukigaya-otsukamachi, Ota-k, Tokyo 01, 〒1458501, JP)
高橋 亨 (〒01 東京都大田区雪谷大塚町1番7号 アルプス電気株式会社内 Tokyo, 〒1458501, JP)
International Classes:
G01P15/08; B81B3/00; B81C99/00; G01C19/56; G01C19/5733; G01P15/125; G01P15/18; H01L29/84
Attorney, Agent or Firm:
NOZAKI, Teruo et al. (Oak Ikebukuro Building 3F, 1-21-11 Higashi-Ikebukuro Toshima-k, Tokyo 13, 〒1700013, JP)
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Claims: