Title:
PHYSICAL QUANTITY SENSOR AND PROCESS FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2011/162305
Kind Code:
A1
Abstract:
Disclosed are: a physical quantity sensor which can detect multiple physical quantities simultaneously; and a process for producing the physical quantity sensor.
Specifically disclosed is a physical quantity sensor (100), which has flexibility or bendability over the entire body thereof, and which comprises a substrate (1), an electrode layer (2) formed on the substrate (1), a piezoelectric element (3a) and a piezoelectric element (3b) both arranged in parallel to each other on the electrode layer (2), electrode layers (4a, 4b) respectively formed on the piezoelectric elements (3a, 3b), and protective layers (5a, 5b, 5c, 5d, 5e) respectively protecting the electrode layer (2), the piezoelectric elements (3a, 3b) and the electrode layers (4a, 4b). The substrate (1), the electrode layer (2), the piezoelectric element (3a) (a first piezoelectric element), the electrode layer (4a) (a third electrode layer) and the protective layers (5a, 5b, 5c, 5d, 5e) constitute a first physical quantity detection unit (6), and the substrate (1), the electrode layer (2), the piezoelectric element (3b) (a second piezoelectric element) and the electrode layer (4b) (a fourth electrode layer) constitute a second physical quantity detection unit (7).
Inventors:
JIANG Yonggang (2167Shosh, Himeji-shi Hyogo 80, 〒6712280, JP)
蒋 永剛 (〒80 兵庫県姫路市書写２１６７ 兵庫県立大学大学院工学研究科内 Hyogo, 〒6712280, JP)
HIGUCHI Kohei (2167Shosh, Himeji-shi Hyogo 80, 〒6712280, JP)
樋口 行平 (〒80 兵庫県姫路市書写２１６７ 兵庫県立大学大学院工学研究科内 Hyogo, 〒6712280, JP)
蒋 永剛 (〒80 兵庫県姫路市書写２１６７ 兵庫県立大学大学院工学研究科内 Hyogo, 〒6712280, JP)
HIGUCHI Kohei (2167Shosh, Himeji-shi Hyogo 80, 〒6712280, JP)
樋口 行平 (〒80 兵庫県姫路市書写２１６７ 兵庫県立大学大学院工学研究科内 Hyogo, 〒6712280, JP)
Application Number:
JP2011/064308
Publication Date:
December 29, 2011
Filing Date:
June 22, 2011
Export Citation:
Assignee:
Japan Science and Technology Agency (1-8Honcho 4-chome, Kawaguchi-shi Saitama, 12, 〒3320012, JP)
独立行政法人科学技術振興機構 (〒12 埼玉県川口市本町四丁目１番８号 Saitama, 〒3320012, JP)
HYOGO PREFECTURE (10-1, Shimoyamate-dori 5-chomeChuo-k, Kobe-shi Hyogo 67, 〒6508567, JP)
兵庫県 (〒67 兵庫県神戸市中央区下山手通５丁目１０番１号 Hyogo, 〒6508567, JP)
JIANG Yonggang (2167Shosh, Himeji-shi Hyogo 80, 〒6712280, JP)
蒋 永剛 (〒80 兵庫県姫路市書写２１６７ 兵庫県立大学大学院工学研究科内 Hyogo, 〒6712280, JP)
独立行政法人科学技術振興機構 (〒12 埼玉県川口市本町四丁目１番８号 Saitama, 〒3320012, JP)
HYOGO PREFECTURE (10-1, Shimoyamate-dori 5-chomeChuo-k, Kobe-shi Hyogo 67, 〒6508567, JP)
兵庫県 (〒67 兵庫県神戸市中央区下山手通５丁目１０番１号 Hyogo, 〒6508567, JP)
JIANG Yonggang (2167Shosh, Himeji-shi Hyogo 80, 〒6712280, JP)
蒋 永剛 (〒80 兵庫県姫路市書写２１６７ 兵庫県立大学大学院工学研究科内 Hyogo, 〒6712280, JP)
International Classes:
G01L1/16
Attorney, Agent or Firm:
NARA Yasuhiro (NARA PATENT FIRM, Tenmabashi Chiyoda Bldg. No.21-1,Kokumachi 1-chome,Chuo-k, Osaka-shi Osaka 33, 〒5400033, JP)
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Claims: