Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/111540
Kind Code:
A1
Abstract:
Disclosed is a physical quantity sensor that can control electrical shorts particularly between a mobile section (mobile electrode) and a fixed electrode layer. The sensor comprises: a substrate having an anchor section (29) and a mobile section (34) that is supported by the anchor section with a spring section therebetween in a manner so as to be displaceable in the height direction; a facing section (20) that faces the substrate in the height direction and affixes/supports the anchor section, and that faces the mobile section leaving a gap therebetween in the height direction; a projecting section (23) the surface of which, along with the fixed electrode layer (28) formed on the surface of the facing section, is a stopper surface with respect to the mobile section; a fixed support section (22) provided to the surface of the facing section; and a joining section (26) comprising metal layers that join between the fixed support section and the anchor section. The projecting section (23) protrudes from the surface of the facing section (20), and the fixed electrode layer (28) is disposed at the surface of the indented facing section. The surface of the projecting section (23) protrudes more in the height direction than the surface of the fixed electrode layer (28) does.

Inventors:
MIYATAKE AKIRA (JP)
TAKAHASHI TORU (JP)
KOBAYASHI TOSHIHIRO (JP)
UTO YOSHITAKA (JP)
YAZAWA HISAYUKI (JP)
OKAWA HISANOBU (JP)
Application Number:
PCT/JP2011/054114
Publication Date:
September 15, 2011
Filing Date:
February 24, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ALPS ELECTRIC CO LTD (JP)
MIYATAKE AKIRA (JP)
TAKAHASHI TORU (JP)
KOBAYASHI TOSHIHIRO (JP)
UTO YOSHITAKA (JP)
YAZAWA HISAYUKI (JP)
OKAWA HISANOBU (JP)
International Classes:
G01P15/125; B81B3/00; H01L29/84
Foreign References:
JP2002539460A2002-11-19
JPH09506975A1997-07-08
JP2004506203A2004-02-26
JP2008241481A2008-10-09
JPH07113817A1995-05-02
Attorney, Agent or Firm:
NOZAKI, Teruo et al. (JP)
Teruo Nozaki (JP)
Download PDF:
Claims:



 
Previous Patent: PHYSICAL QUANTITY SENSOR

Next Patent: MEMS SENSOR