Title:
PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/105591
Kind Code:
A1
Abstract:
[Problem] The purpose of the invention is to provide a physical quantity sensor with particularly high sensitivity and outstanding detection stability. [Solution] Formed in mutual detachment on a silicon substrate are: anchor sections (6, 7); a movable section (2); and support sections (3, 4, 13, 14) that freely rotatably connect the anchor sections and the movable section through spring sections. A pair of first anchor sections is placed on both front/back-direction sides of the movable section (2), and a first support section that extends in the left/right direction is freely rotatably connected to each member of the pair of first anchor sections. Second anchor sections are placed in the left/right direction relative to the first anchor sections, and a second support section that extends in the left/right direction is freely rotatably connected to each member of the pair of second anchor sections. A first foot section is formed facing leftward on the first support section, and a second foot section is provided facing rightward on the second support section.
Inventors:
OKAWA HISANOBU (JP)
YAZAWA HISAYUKI (JP)
TAKAHASHI TORU (JP)
KIKUIRI KATSUYA (JP)
YAZAWA HISAYUKI (JP)
TAKAHASHI TORU (JP)
KIKUIRI KATSUYA (JP)
Application Number:
PCT/JP2013/050262
Publication Date:
July 18, 2013
Filing Date:
January 10, 2013
Export Citation:
Assignee:
ALPS ELECTRIC CO LTD (JP)
International Classes:
G01P15/125; G01P15/18; H01L29/84
Domestic Patent References:
| WO2009125510A1 | 2009-10-15 | |||
| WO2010001947A1 | 2010-01-07 | |||
| WO2010140574A1 | 2010-12-09 |
Foreign References:
| JP2007530914A | 2007-11-01 |
Attorney, Agent or Firm:
NOZAKI, Teruo et al. (JP)
Teruo Nozaki (JP)
Teruo Nozaki (JP)
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