PHYSICAL QUANTITY SENSOR

Title:

PHYSICAL QUANTITY SENSOR

Document Type and Number:

WIPO Patent Application WO/2014/156119

Kind Code:

A1

Abstract:

This physical quantity sensor is provided with a supporting substrate (1011), first and second movable parts (1020, 1030), and lower electrodes (1071-1074). The first and second movable parts are situated apart from the supporting substrate in the direction of the normal line with respect to the planar direction of the supporting substrate, and are rotatable in response to a physical quantity when the physical quantity is applied in the direction of the normal line. The lower electrodes are situated on the supporting substrate, facing the first and second movable parts. The first and second movable parts are identical in planar shape and have torsion beams (1023, 1033) which serve as rotating shafts during respective rotation thereof, and which are supported on the supporting substrate through the agency of anchor portions (1024, 1034); the parts are moreover arranged in rotationally symmetric fashion so as to line up with mutual hypothetical lines (LA) extending along the torsion beams from a center at a prescribed reference point (1019) of the substrate, and are unified through the agency of a linking beam (1060) positioned on the hypothetical lines.

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Inventors:

MIYAZAKI TAKAHIRO (JP)
SAKAI MINEKAZU (JP)
SUGIMOTO KIYOMASA (JP)
MARUYAMA YUMI (JP)

Application Number:

PCT/JP2014/001697

Publication Date:

October 02, 2014

Filing Date:

March 25, 2014

Export Citation:

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Assignee:

DENSO CORP (JP)

International Classes:

G01P15/125; B81B3/00; H01L29/84

Domestic Patent References:

WO2008133183A1

2008-11-06

Foreign References:

JP2012154919A	2012-08-16
JP2008544243A	2008-12-04
JP2012141160A	2012-07-26
JP2011106822A	2011-06-02
JP2011017699A	2011-01-27

Attorney, Agent or Firm:

KIN, Junhi (JP)
Gold Junki (JP)

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