Title:
PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/208043
Kind Code:
A1
Abstract:
This physical quantity sensor is provided with a first substrate (10), a second substrate (40) joined to the first substrate, and a sensing unit (60) situated within an airtight chamber (90) formed between the first substrate and the second substrate, for outputting a sensor signal in response to a physical quantity. The second substrate is constituted by a p-type silicon substrate having resistivity of 0.01-0.2 ［Ω・cm］, and has a bonded substrate (41) which is maintained at a prescribed potential through connection to a contact part (80) constituted of metal material.
Inventors:
SUGIMOTO KIYOMASA (JP)
SAKAI MINEKAZU (JP)
SAKAI MINEKAZU (JP)
Application Number:
PCT/JP2014/003219
Publication Date:
December 31, 2014
Filing Date:
June 17, 2014
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01P15/08; G01P15/125; H01L29/84
Foreign References:
| JP2009283900A | 2009-12-03 | |||
| JP2006344934A | 2006-12-21 | |||
| JP2011017693A | 2011-01-27 | |||
| JP2010171368A | 2010-08-05 |
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
Gold Junki (JP)
Download PDF:
Previous Patent: VEHICULAR VOICE OUTPUT CONTROL DEVICE
Next Patent: ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING SAID ELECTRONIC DEVICE
Next Patent: ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING SAID ELECTRONIC DEVICE