Title:
PICOMETER OPTICAL COMB AND MANUFACTURING DEVICE AND METHOD FOR PICOMETER OPTICAL COMB
Document Type and Number:
WIPO Patent Application WO/2020/224254
Kind Code:
A1
Abstract:
A picometer optical comb (107), and a manufacturing device and manufacturing method for the picometer optical comb (107). The picometer optical comb (107) is a special optical grating of which the slot widths of adjacent gate lines are continuously variable, wherein the width of each gate slot differs from the width of the adjacent gate slot by a fixed difference value, such as Δd that may be from a picometer scale to a nanometer scale. The picometer optical comb (107) provides a datum for picometer measurement. The picometer optical comb generates a diffractive light field distribution different from the traditional optical grating, so that a new diffraction effect and a new diffraction optical function are achieved and tools for picometer photoetching, picometer measurement, picometer imaging and the like are provided; thus the picometer optical comb (107) would play an important role in multiple fields of semiconductor photoetching, bioscience, light-matter interaction in the picometer scale and the like.
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Inventors:
ZHOU CHANGHE (CN)
Application Number:
PCT/CN2019/122873
Publication Date:
November 12, 2020
Filing Date:
December 04, 2019
Export Citation:
Assignee:
SHANGHAI INST OPTICS & FINE MECH CAS (CN)
International Classes:
G02B5/18; G03F7/20
Foreign References:
| CN110187424A | 2019-08-30 | |||
| CN102289013A | 2011-12-21 | |||
| CN107179576A | 2017-09-19 | |||
| CN104765088A | 2015-07-08 | |||
| CN109696717A | 2019-04-30 | |||
| JP2006072112A | 2006-03-16 |
Attorney, Agent or Firm:
SHANGHAI HENGHUI INTELLECTUAL PROPERTY AGENCY (CN)
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