Title:
PIEZO ELECTRIC ON SEMINCONDUCTOR ON- INSULATOR RESONATOR
Document Type and Number:
WIPO Patent Application WO2004013893
Kind Code:
A3
Abstract:
A piezoelectric resonator (205) is disclosed. In one embodiment the piezo electric resonator includes a semiconductor material (206) an electrode (210) and a piezo electric material (208) disposed between the semiconductor material and the electrode.
Inventors:
AYAZI FARROKH
PIAZZA GIANLUCA
ABDOLVAND REZA
HO GAVIN KAR-FAI
HUMAD SHWETA
PIAZZA GIANLUCA
ABDOLVAND REZA
HO GAVIN KAR-FAI
HUMAD SHWETA
Application Number:
PCT/US2003/024051
Publication Date:
July 15, 2004
Filing Date:
July 31, 2003
Export Citation:
Assignee:
GEORGIA TECH RES INST (US)
International Classes:
H03H3/02; H03H9/02; (IPC1-7): H01L41/08
Foreign References:
| US5663505A | 1997-09-02 | |||
| US3513356A | 1970-05-19 | |||
| US3634787A | 1972-01-11 |
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