Title:
PIEZO-OSCILLATOR AND PRODUCTION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2000/005812
Kind Code:
A1
Abstract:
A piezo-oscillator which prevents an exciting electrode from being kept open between the upper surface and the lower surface of a piezo-oscillator piece even when a noble metal layer is partly removed in order to increase the adhesiveness of a surface protection layer; and a production method of the piezo-oscillator. An electrode pattern (40) of an exciting electrode (45) in the piezo-oscillator piece (2) of the piezo-oscillator (1) is formed of a base metal layer (41). An electrode pattern (40) of a conductive electrode (46) is formed of a base metal layer (41) except at portions where the side surfaces (271, 272) of the piezo-oscillator piece (2) have curved or bent shapes. The electrode pattern (40) at those portions is formed of a base material layer (41) and a gold electrode layer (42).
Inventors:
NAGAI MITSURU (JP)
KASUGA YOSHIHARU (JP)
KASUGA YOSHIHARU (JP)
Application Number:
PCT/JP1999/003977
Publication Date:
February 03, 2000
Filing Date:
July 23, 1999
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
NAGAI MITSURU (JP)
KASUGA YOSHIHARU (JP)
NAGAI MITSURU (JP)
KASUGA YOSHIHARU (JP)
International Classes:
B44C1/22; C03C15/00; C03C25/68; C23F1/00; H03H3/02; H03H9/215; H04R17/00; (IPC1-7): H03H9/19; H03H3/02; H03H9/215
Foreign References:
| JPH09326668A | 1997-12-16 | |||
| JPH07212161A | 1995-08-11 | |||
| JPH05129874A | 1993-05-25 | |||
| JPH02298110A | 1990-12-10 | |||
| JPS6310815A | 1988-01-18 | |||
| JPS57164615A | 1982-10-09 | |||
| JPS5732115A | 1982-02-20 | |||
| JPS5583316A | 1980-06-23 | |||
| JPS6127929B2 | 1986-06-27 | |||
| JPS5832524B2 | 1983-07-13 | |||
| JPS5821965B2 | 1983-05-06 | |||
| JPS6085425U | 1985-06-12 | |||
| JPS59125129U | 1984-08-23 | |||
| JPS5798033U | 1982-06-16 | |||
| JPS5736019U | 1982-02-25 |
Attorney, Agent or Firm:
Suzuki, Kisaburo (Owa 3-chome Suwa-shi, Nagano, JP)
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