Title:
PIEZOELECTRIC ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/043219
Kind Code:
A1
Abstract:
Provided is a piezoelectric acceleration sensor excellent in output sensitivity, in which compensation of electric charges does not occur in an electrical-mechanical conversion element.
The piezoelectric acceleration sensor is configured with a piezoelectric element on which a polarization process is performed in a predetermined direction, a metal plate, and a substrate. The substrate includes a substrate circuit portion and a substantially planar substrate base portion protruding from an end of the substrate circuit portion. Further, one plate surface of the metal plate is supported by and fixed to one surface of the substrate base portion; the other plate surface of the metal plate supports and fixes the piezoelectric element so that the piezoelectric element and the substrate base portion are not overlapped with each other in the predetermined direction.
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Inventors:
SAITO MASUTO (JP)
Application Number:
PCT/JP2010/066756
Publication Date:
April 14, 2011
Filing Date:
September 28, 2010
Export Citation:
Assignee:
NEC TOKIN CORP (JP)
SAITO MASUTO (JP)
SAITO MASUTO (JP)
International Classes:
G01P15/09; H01L29/84; H01L41/09
Foreign References:
JP2003156508A | 2003-05-30 | |||
JP2000121661A | 2000-04-28 | |||
JPH10260203A | 1998-09-29 | |||
JP2006023287A | 2006-01-26 |
Attorney, Agent or Firm:
YAMAZAKI, TAKUYA (JP)
Takuya Yamazaki (JP)
Takuya Yamazaki (JP)
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