PIEZOELECTRIC ACTUATOR, DEFORMABLE MIRROR AND METHOD FOR MANUFACTURING DEFORMABLE MIRROR

WIPO Patent Application WO/2018/041240

A1

A piezoelectric actuator (10) comprises: a first piezoelectric single crystal (111), a second piezoelectric single crystal (112), a third piezoelectric single crystal (121), a fourth piezoelectric single crystal (122) and a level connector (300), wherein the level connector (300) has a first surface and a second surface which are parallel to and opposite to each other. One end of the first piezoelectric single crystal (111) and one end of the second piezoelectric single crystal (112) are oriented in parallel and mounted apart along an edge on the first surface of the level connector (300). One end of the third piezoelectric single crystal (121) and one end of the fourth piezoelectric single crystal (122) are also oriented in parallel and mounted similarly apart but along the orthogonal edge on the second surface of the level connector (300). The piezoelectric actuator (10) has the advantages of small volume, low hysteresis and multi-degree-of-freedom control.

WO/1996/004582	DISPLAY SYSTEM
JP2004086165	MANUFACTURING METHOD OF DISPLAY DEVICE
JP2004226630	OPTICAL SWITCHING ELEMENT AND OPTICAL CIRCUIT

LIU GUOXI (CN)
WANG PENGHUI (CN)
WANG ZHIPENG (CN)
SHI HUADUO (CN)

PCT/CN2017/100094

March 08, 2018

August 31, 2017

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BEIJING SUPERSONIC TECH CO LTD (CN)

G02B26/08

WO2011135943A1	2011-11-03
WO2013100860A1	2013-07-04

US20090323150A1	2009-12-31
JP2013110886A	2013-06-06
US4736132A	1988-04-05
CN106199949A	2016-12-07
CN206133113U	2017-04-26
US20080202222A1	2008-08-28
JP2011170298A	2011-09-01

See also references of EP 3507645A4

CHOFN INTELLECTUAL PROPERTY (CN)

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