PIEZOELECTRIC ACTUATOR AND FLUID INJECTION HEAD HAVING THE SAME

Title:

PIEZOELECTRIC ACTUATOR AND FLUID INJECTION HEAD HAVING THE SAME

Document Type and Number:

WIPO Patent Application WO/2003/078166

Kind Code:

A1

Abstract:

A first common electrode fixed to a predetermined potential is formed on a vibration plate. A first piezoelectric layer having a first thickness is arranged on the first common electrode. A drive electrode supplied with a drive signal from outside is arranged on the first piezoelectric layer. A second piezoelectric layer having a second thickness greater than the first thickness is arranged on the drive electrode. A second common electrode fixed to the predetermined potential is arranged on the second piezoelectric layer.

Inventors:

CHANG JUNHUA (JP)
KATAKURA TAKAHIRO (JP)

Application Number:

PCT/JP2003/003153

Publication Date:

September 25, 2003

Filing Date:

March 17, 2003

Export Citation:

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Assignee:

SEIKO EPSON CORP (JP)
CHANG JUNHUA (JP)
KATAKURA TAKAHIRO (JP)

International Classes:

B41J2/055; B41J2/14; B41J2/16; F04B43/04; B41J2/045; H01L41/083; H01L41/09; (IPC1-7): B41J2/045; B41J2/055; H01L41/09

Foreign References:

EP0709195A1	1996-05-01
JPH09323410A	1997-12-16
JPH11207975A	1999-08-03
JPH09277531A	1997-10-28
JPH08118630A	1996-05-14

Other References: