Title:
PIEZOELECTRIC ACTUATOR, ITS MANUFACTURING METHOD, AND INK-JET HEAD COMPRISING THE SAME
Document Type and Number:
WIPO Patent Application WO/2001/075985
Kind Code:
A1
Abstract:
An actuator for ink-jet heads having a high sensitivity and a high durability. A perovskite oxide is hetero epitaxially grown through an intermediate film on a monocrystalline Si substrate so as to form a monocrystalline piezoelectric thin film the crystal orientation of which is aligned with the Si substrate, thus producing a piezoelectric actuator.
Inventors:
KURIHARA KAZUAKI (JP)
NISHIZAWA MOTOYUKI (JP)
KURASAWA MASAKI (JP)
OKAMOTO KEISHIRO (JP)
NISHIZAWA MOTOYUKI (JP)
KURASAWA MASAKI (JP)
OKAMOTO KEISHIRO (JP)
Application Number:
PCT/JP2000/002036
Publication Date:
October 11, 2001
Filing Date:
March 30, 2000
Export Citation:
Assignee:
FUJITSU LTD (JP)
KURIHARA KAZUAKI (JP)
NISHIZAWA MOTOYUKI (JP)
KURASAWA MASAKI (JP)
OKAMOTO KEISHIRO (JP)
KURIHARA KAZUAKI (JP)
NISHIZAWA MOTOYUKI (JP)
KURASAWA MASAKI (JP)
OKAMOTO KEISHIRO (JP)
International Classes:
B41J2/14; B41J2/16; H01L27/20; H01L41/09; H01L41/22; H01L41/316; H01L41/332; (IPC1-7): H01L41/08; B41J2/045
Foreign References:
| JPH10120494A | 1998-05-12 | |||
| US5567979A | 1996-10-22 | |||
| JPH06196018A | 1994-07-15 | |||
| JP2000052558A | 2000-02-22 | |||
| JP2000015809A | 2000-01-18 | |||
| JPH11179906A | 1999-07-06 | |||
| JPH11138809A | 1999-05-25 | |||
| JPH1148477A | 1999-02-23 |
Attorney, Agent or Firm:
Itoh, Tadahiko (Yebisu Garden Place Tower 20-3 Ebisu 4-chome Shibuya-ku, Tokyo, JP)
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