Title:
PIEZOELECTRIC ACTUATOR AND MASS FLOW CONTROLLER PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2014/051087
Kind Code:
A1
Abstract:
[Problem] To provide a piezoelectric actuator, and a mass flow controller provided with the same, that can suppress fatigue failure of the joint of a groove due to tensile stress. [Solution] This piezoelectric actuator is provided with the following: a piezoelectric element (1); a base (2) the top surface of which is in contact with the bottom of the piezoelectric element (1); and a case (3) within which the piezoelectric element (1) is enclosed and an inner surface of which is in contact with the upper part of the piezoelectric element (1). The piezoelectric actuator is configured so that the upper surface of the base (2) and the case (3) are connected. The case (3) has a tubular section (31) in which a plurality of circumferential direction grooves (311) are provided. In at least one of the circumferential direction grooves (311) of the plurality of circumferential direction grooves (311), the thickness of the tubular section (31) at a bottom (30) position is thinner than the thickness of the tubular section (31) at positions other than the bottom (30).
Inventors:
IWASHITA AKIRA (JP)
SETOGUCHI TSUYOSHI (JP)
SETOGUCHI TSUYOSHI (JP)
Application Number:
PCT/JP2013/076358
Publication Date:
April 03, 2014
Filing Date:
September 27, 2013
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L41/053; B41J2/16; H01L41/083; H01L41/09; H01L41/23; H02N2/00; F02M51/00
Domestic Patent References:
| WO2012026564A1 | 2012-03-01 |
Foreign References:
| JP2011129736A | 2011-06-30 | |||
| JPH07202285A | 1995-08-04 | |||
| JP2003097418A | 2003-04-03 | |||
| JPH1122845A | 1999-01-26 |
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