Title:
PIEZOELECTRIC ACTUATOR FOR TUNABLE ELECTRONIC COMPONENTS
Document Type and Number:
WIPO Patent Application WO2004038818
Kind Code:
A3
Abstract:
An actuating assembly for tuning a circuit and a process for forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed.The actuating assembly comprises a membrane (1) overlying a circuit (2) to be tuned, a conductive element (4) connected with the membrane, and a piezoelectric arrangement (5).Changes in shape of the piezoelectric arrangement allow a deflection of the membrane and a corresponding controllable upward or downward movement of the conductive element. In the process, a membrane and a piezoelectric structure are formed on a substrate.
Inventors:
MEHTA SARABJIT (US)
Application Number:
PCT/US2003/032282
Publication Date:
September 30, 2004
Filing Date:
October 10, 2003
Export Citation:
Assignee:
HRL LAB LLC (US)
MEHTA SARABJIT (US)
MEHTA SARABJIT (US)
International Classes:
H01G5/18; H01L41/09; H01L41/22; (IPC1-7): H01L41/09; H01L41/22; H01G5/16; H01P5/04
Foreign References:
| US20020109436A1 | 2002-08-15 | |||
| US6377438B1 | 2002-04-23 | |||
| US6215644B1 | 2001-04-10 | |||
| US6404304B1 | 2002-06-11 |
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