Title:
PIEZOELECTRIC BODY MEMBRANE, PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/180276
Kind Code:
A1
Abstract:
The present invention provides a piezoelectric body membrane, a piezoelectric element, and a piezoelectric element manufacturing method with which excellent piezoelectric characteristics can be obtained even under a high temperature environment. The piezoelectric body membrane of the present invention contains a perovskite-type oxide expressed by expression (1), wherein the content q of Nb with respect to the total number of atoms in the perovskite-type oxide, and the ratio r of a diffraction peak intensity from a (200) plane with respect to a diffraction peak intensity from a (100) plane of the perovskite-type oxide as measured by X-ray diffraction method satisfies expression (2).
Expression (1): A1+δ[(ZryTi1-y)1-xNbx]Oz,
Expression (2): 0.35≦r/q<0.58,
where A is an A site element containing Pb, x and y are respectively independently more than zero and not more than 1, and δ and z respectively have the standard values of 0 and 3, the values being allowed to deviate from the standard values to the extent that the perovskite-type oxide can have a perovskite structure. In expression (2), the unit of q is atm%.
Inventors:
MURAKAMI NAOKI (JP)
SAWAKI DAIGO (JP)
SAWAKI DAIGO (JP)
Application Number:
PCT/JP2018/008542
Publication Date:
October 04, 2018
Filing Date:
March 06, 2018
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L41/187; C23C14/08; H01L41/316; H01L41/319; H01L41/39
Foreign References:
| JP2006083040A | 2006-03-30 | |||
| JP2012009677A | 2012-01-12 | |||
| JP2009065049A | 2009-03-26 | |||
| JP2016103567A | 2016-06-02 | |||
| JP2011181720A | 2011-09-15 | |||
| JP2007251388A | 2007-09-27 | |||
| JP2005150694A | 2005-06-09 |
Other References:
See also references of EP 3605625A4
Attorney, Agent or Firm:
WATANABE Mochitoshi et al. (JP)
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