Title:
PIEZOELECTRIC DEVICE AND ACOUSTIC TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2020/230358
Kind Code:
A1
Abstract:
In the present invention, a substrate (110) has a first principal surface (111) and a second principal surface (112). A piezoelectric element (120) is positioned on the first principal surface (111), and a lid (130) is also positioned on the first principal surface (111). The lid (130) is spaced apart from the piezoelectric element (120) on the first principal surface (111) side and covers the piezoelectric element (120). The piezoelectric element (120) includes a base part (121) and a membrane part (122). The base part (121) is positioned on the first principal surface (111) and has an annular outer shape when viewed from the first principal surface (111) side. The membrane part (122) is positioned on the inside of the annular base part (121) when viewed from the first principal surface (111) side. A first through hole (131) is formed in the lid (130). A second through hole (117) penetrating from the first principal surface (111) to the second principal surface (112) is formed in the substrate (110) at a position facing the membrane part (122).
Inventors:
IKEUCHI SHINSUKE (JP)
UMEZAWA SEIJI (JP)
KUROKAWA FUMIYA (JP)
UMEZAWA SEIJI (JP)
KUROKAWA FUMIYA (JP)
Application Number:
PCT/JP2019/051194
Publication Date:
November 19, 2020
Filing Date:
December 26, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/02; H04R17/00; H03H9/17
Domestic Patent References:
| WO2011093157A1 | 2011-08-04 | |||
| WO2014061584A1 | 2014-04-24 |
Foreign References:
| JP2008236556A | 2008-10-02 | |||
| JPS5969591U | 1984-05-11 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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