PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD THEREOF

Title:

PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD THEREOF

Document Type and Number:

WIPO Patent Application WO/2006/134928

Kind Code:

A1

Abstract:

There are provided a piezoelectric device capable of assuring mold resistance without increasing the cost and a manufacturing method thereof. The piezoelectric device includes: an element substrate (12) having a piezoelectric element (14) and a conductor pattern (15) electrically connected to the piezoelectric element (14) which are formed on at least one main surface of element substrate (12); and insulating members (20, 22) arranged on the element substrate (12) to cover a portion surrounding the piezoelectric element (14) leaving a s space around the piezoelectric element (14). The insulating members (20, 22) have an internal conductor connected to the conductor pattern (15) and extending apart from the element substrate (12). The internal conductor has protruding portions (17b, 17c) protruding in the direction intersecting its wiring direction or a detour portion out of the wiring direction. The protruding portions (17b, 17c) or the detour portion goes across the boundary of sealing space (13) formed around the piezoelectric element when viewed from the normal direction of the main surface of the element substrate.

Inventors:

IWAMOTO TAKASHI (JP)
KISHIMOTO YASUNORI (JP)

Application Number:

PCT/JP2006/311851

Publication Date:

December 21, 2006

Filing Date:

June 13, 2006

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)
IWAMOTO TAKASHI (JP)
KISHIMOTO YASUNORI (JP)

International Classes:

H03H9/25; H01L23/08; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/23; H01L41/29; H01L41/311; H03H3/02; H03H3/08; H03H9/02; H03H9/145; H03H9/17; H03H9/58

Foreign References:

JP2005079694A	2005-03-24
JP2000353934A	2000-12-19
JP2003046017A	2003-02-14
JP2004282175A	2004-10-07
JP2002217673A	2002-08-02
JPH06164292A	1994-06-10
JP2003037471A	2003-02-07
JP2004165874A	2004-06-10
EP0794616A2	1997-09-10
EP1361657A1	2003-11-12
EP0735671A1	1996-10-02

Other References: