Title:
PIEZOELECTRIC DEVICE AND PIEZOELECTRIC DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/067483
Kind Code:
A1
Abstract:
A piezoelectric device is provided which has a high ability to convert between mechanical energy and electrical energy. This piezoelectric device comprises a first electrode layer, a second electrode layer, and a piezoelectric layer arranged between the first electrode layer and the second electrode layer. In the piezoelectric layer, a non-conductive metal is added to a ZnO-base material that has a Wurtzite-type crystal structure, and the square value of the electromechanical coupling coefficient in thickness vibration mode is greater than or equal to 6.5%.
Inventors:
NAKAMURA DAISUKE (JP)
NAGAOKA NAOKI (JP)
KUROSE MANAMI (JP)
MACHINAGA HIRONOBU (JP)
ISHIKAWA TAKETO (JP)
YANAGITANI TAKAHIKO (JP)
NAGAOKA NAOKI (JP)
KUROSE MANAMI (JP)
MACHINAGA HIRONOBU (JP)
ISHIKAWA TAKETO (JP)
YANAGITANI TAKAHIKO (JP)
Application Number:
PCT/JP2019/038291
Publication Date:
April 02, 2020
Filing Date:
September 27, 2019
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H01L41/187; C23C14/08; H01L41/053; H01L41/316; H01L41/319
Foreign References:
| JP2011134787A | 2011-07-07 | |||
| JP2005252069A | 2005-09-15 | |||
| JP2008211095A | 2008-09-11 | |||
| JP2014229690A | 2014-12-08 | |||
| JPH08310813A | 1996-11-26 | |||
| JP2005303573A | 2005-10-27 | |||
| JP2018185549A | 2018-11-22 | |||
| JP2019176135A | 2019-10-10 | |||
| JP6273691B2 | 2018-02-07 | |||
| JPH08310813A | 1996-11-26 |
Other References:
See also references of EP 3859801A4
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Download PDF:
Previous Patent: ROTATING ELECTRIC MACHINE CONTROL DEVICE
Next Patent: RESONATOR AND RESONANCE DEVICE
Next Patent: RESONATOR AND RESONANCE DEVICE