Title:
PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2012/039266
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a piezoelectric device, which comprises: a piezoelectric body formation step (S3) wherein a piezoelectric body (4) is formed on a substrate (1); and a polishing step (S7) wherein a surface of the substrate (1) is polished after the piezoelectric body formation step, said surface being on the reverse side of the surface on which the piezoelectric body (4) is formed. In the piezoelectric body formation step, the piezoelectric body (4) is formed on a substrate (1) so that the orientation thereof is in the (001) direction with respect to the surface of the substrate (1).
Inventors:
MATSUDA SHINYA (JP)
Application Number:
PCT/JP2011/070011
Publication Date:
March 29, 2012
Filing Date:
September 02, 2011
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC (JP)
MATSUDA SHINYA (JP)
MATSUDA SHINYA (JP)
International Classes:
H01L41/08; B41J2/14; B41J2/16; C23C14/08; H01L41/09; H01L41/18; H01L41/22; H01L41/253; H01L41/312; H01L41/337; H01L41/39; H03H3/02; H03H9/17
Foreign References:
| JP2002237626A | 2002-08-23 | |||
| JP2007005374A | 2007-01-11 | |||
| JP2005235796A | 2005-09-02 | |||
| JP2004297693A | 2004-10-21 | |||
| JP2009124587A | 2009-06-04 |
Attorney, Agent or Firm:
SANO SHIZUO (JP)
Shizuo Sano (JP)
Shizuo Sano (JP)
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Claims: