PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE

WIPO Patent Application WO/2010/082571

A1

Provided is a piezoelectric device which solves various problems generated due to an IDT electrode provided therein. A piezoelectric device (10D) is composed of a structure wherein a piezoelectric thin film (10) and a supporting body (30B) are bonded together such that the piezoelectric thin film (10) is supported by the supporting body (30B).  On the piezoelectric thin film (10) surface on the side of the supporting body (30B), an IDT electrode (60) and a wiring electrode (61) are formed.  In a region where the IDT electrode (60) of the piezoelectric thin film (10) is formed, the supporting body (30B) is not formed but an opening section (31) is formed.  Thus, the IDT electrode (60) and the piezoelectric thin film (10) in the region where the IDT electrode is formed are not in contact with the supporting body (30B), and while the IDT electrode (60) is formed inside of the piezoelectric device (10D), so called a membrane having only the piezoelectric thin film (10) and the IDT electrode (60) as constituent elements, which are important to the characteristics of the piezoelectric device (10D), is formed.

IWAMOTO TAKASHI (JP)
KANDO HAJIME (JP)

PCT/JP2010/050244

July 22, 2010

January 13, 2010

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MURATA MANUFACTURING CO (JP)
IWAMOTO TAKASHI (JP)
KANDO HAJIME (JP)

H03H9/25; H01L41/09; H01L41/18; H03H3/08

JP2002534886A	2002-10-15
US20080252396A1	2008-10-16
JP2003017967A	2003-01-17
JP2007325013A	2007-12-13

Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)

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