Title:
PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/065317
Kind Code:
A1
Abstract:
Disclosed is a piezoelectric device which is not deteriorated in the resonance characteristics even in cases where an intermediate layer for bonding is provided between a piezoelectric thin film and a supporting body. Also disclosed is a method for manufacturing a piezoelectric device.
Specifically, after forming an ion injected region within a piezoelectric single crystal substrate (1) by injecting hydrogen ions thereinto, a metal intermediate layer (32) is formed on the back surface (12) of the piezoelectric single crystal substrate (1). The piezoelectric single crystal substrate (1) and a supporting body (30) are then bonded together, while having the intermediate layer (32) interposed therebetween. A composite piezoelectric body (2), which is provided with the ion injected region, or a composite piezoelectric substrate (3), which is obtained by heating and separating the piezoelectric single crystal substrate (1), is heated at 450-700˚C, so that the metal in the intermediate layer is oxidized, thereby decreasing the conductivity. Consequently, the piezoelectric substrate and the supporting body can be reliably bonded together by forming the metal intermediate layer. In addition, since the metal intermediate layer is oxidized, the conductivity of the intermediate layer can be decreased, thereby providing a piezoelectric device that has good resonance characteristics.
Inventors:
ITO KOREKIYO (JP)
Application Number:
PCT/JP2010/070765
Publication Date:
June 03, 2011
Filing Date:
November 22, 2010
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
ITO KOREKIYO (JP)
ITO KOREKIYO (JP)
International Classes:
H03H9/145; H03H3/02; H03H3/08; H03H9/17
Domestic Patent References:
| WO2006092982A1 | 2006-09-08 |
Foreign References:
| JPH05243895A | 1993-09-21 | |||
| JP2002057549A | 2002-02-22 | |||
| JP2005167969A | 2005-06-23 | |||
| JP2003017967A | 2003-01-17 | |||
| JP2004343359A | 2004-12-02 | |||
| JP2007324195A | 2007-12-13 |
Other References:
See also references of EP 2506431A4
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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