Title:
PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/189413
Kind Code:
A1
Abstract:
Provided is a configuration that can suppress leaks between electrodes sandwiching a piezoelectric layer (13) and can reduce deterioration in piezoelectric characteristics. A piezoelectric device (10A) has a first electrode (12), the piezoelectric layer, and a second electrode (14) laminated in said order upon a base material (11). The first electrode and the second electrode are arranged so as to not mutually overlap in the lamination direction.
Inventors:
NAKAMURA DAISUKE (JP)
NAGAOKA NAOKI (JP)
ISHIKAWA TAKETO (JP)
MACHINAGA HIRONOBU (JP)
NAGAOKA NAOKI (JP)
ISHIKAWA TAKETO (JP)
MACHINAGA HIRONOBU (JP)
Application Number:
PCT/JP2020/010302
Publication Date:
September 24, 2020
Filing Date:
March 10, 2020
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H01L41/047; G01L1/16; H01L41/113; H01L41/187; H01L41/29
Foreign References:
| US20170016785A1 | 2017-01-19 | |||
| JP2018170488A | 2018-11-01 | |||
| JP2018170503A | 2018-11-01 | |||
| JPH05296713A | 1993-11-09 | |||
| JP2019052876A | 2019-04-04 |
Other References:
See also references of EP 3944348A4
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Download PDF: