PIEZOELECTRIC DEVICE, AND ULTRASONIC TRANSDUCER

WIPO Patent Application WO/2020/230484

A1

A piezoelectric device (100) is provided with a base board (110), a piezoelectric element (120), and a lid portion (130). The piezoelectric element (120) includes a base portion (121) and a membrane portion (122). The base portion (121) is positioned on a first main surface (111), and has an annular outer shape when viewed from the normal line direction of the first main surface (111). The membrane portion (122) is positioned inside the base portion (121) when viewed from the normal line direction. The lid portion (130) is positioned on the first main surface (111), and covers the piezoelectric element (120) on the first main surface (111) side, separated from the piezoelectric element (120). A first through hole (113) extending from the first main surface (111) to a second main surface (112) is formed in the base board (110) in a position facing the membrane portion (122). A through slit (123) is formed in the membrane portion (122).

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UMEZAWA SEIJI (JP)
IKEUCHI SHINSUKE (JP)
KUROKAWA FUMIYA (JP)
ADACHI NOBUYOSHI (JP)
SUZUKI MASAYUKI (JP)

PCT/JP2020/015815

November 19, 2020

April 08, 2020

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MURATA MANUFACTURING CO (JP)

H04R1/02; H01L41/08; H01L41/09; H01L41/113; H03H9/02; H03H9/17; H04R17/00

WO2011152212A1	2011-12-08
WO2017221762A1	2017-12-28
WO2015190429A1	2015-12-17
WO2011093157A1	2011-08-04

JP2007081614A	2007-03-29
JP2008283312A	2008-11-20
US20170184718A1	2017-06-29
JP2010187076A	2010-08-26
JP2009506658A	2009-02-12

FUKAMI PATENT OFFICE, P.C. (JP)

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