Title:
PIEZOELECTRIC DEVICE, VIBRATION STRUCTURE, AND PIEZOELECTRIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/144941
Kind Code:
A1
Abstract:
This piezoelectric device includes: a film (12) that has a first main surface and a second main surface, and has piezoelectric properties; a first substrate (10) that is disposed on the first main surface side of the film (12); and a first connection member (15) that connects the film (12) to the first substrate (10). The first connection member (15) is a thermosetting resin and has a curing temperature that is lower than the temperature at which the film (12) heat-shrinks.
Inventors:
ENDO JUN (JP)
HASHIMOTO JUNICHI (JP)
TOMINAGA TORU (JP)
OTERA SHOZO (JP)
HASHIMOTO JUNICHI (JP)
TOMINAGA TORU (JP)
OTERA SHOZO (JP)
Application Number:
PCT/JP2019/045269
Publication Date:
July 16, 2020
Filing Date:
November 19, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/053; H01L41/113; H01L41/193; H01L41/312; H02N2/18; H03H9/05; H03H9/17
Foreign References:
| JP2010050796A | 2010-03-04 | |||
| JP2011192665A | 2011-09-29 | |||
| JP2007312157A | 2007-11-29 | |||
| JP2012107968A | 2012-06-07 | |||
| JP2016140009A | 2016-08-04 | |||
| JP2016050877A | 2016-04-11 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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