Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/083572
Kind Code:
A1
Abstract:
To improve sensitivity of a micro-electromechanical system (MEMS) microphone. A piezoelectric device is provided with: a diaphragm; a supporting section that supports at least a part of an end portion of the diaphragm; a piezoelectric film, which is disposed along the part supported by means of the supporting section, and which has a smaller width along the part compared with the width of the part, said piezoelectric film being on the diaphragm; a lower electrode that is disposed on a piezoelectric film surface on the diaphragm side; and an upper electrode that is disposed on a piezoelectric film surface on the reverse side of the diaphragm.
Inventors:
UMEDA KEIICHI (JP)
IMANISHI TOSHIO (JP)
KAAJAKARI VILLE (US)
IMANISHI TOSHIO (JP)
KAAJAKARI VILLE (US)
Application Number:
PCT/JP2014/081018
Publication Date:
June 11, 2015
Filing Date:
November 25, 2014
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H04R17/02
Foreign References:
| JPH0843430A | 1996-02-16 | |||
| JP2004147319A | 2004-05-20 | |||
| JP2012217035A | 2012-11-08 | |||
| JPH11226011A | 1999-08-24 | |||
| JPS57143797U | 1982-09-09 | |||
| JP2013239858A | 2013-11-28 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Yoshiyuki Inaba (JP)
Yoshiyuki Inaba (JP)
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