Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/190322
Kind Code:
A1
Abstract:
This piezoelectric device is provided with: a substrate (1); a piezoelectric layer (4) which is arranged above the substrate (1) and is supported by the substrate (1) directly or indirectly such that at least a part thereof forms a membrane part (7) that does not overlap the substrate (1); a lower electrode (3) which is arranged below the piezoelectric layer (4) at least in the membrane part (7); and an upper electrode (5) which is arranged above the piezoelectric layer (4) so as to face at least a part of the lower electrode (3) in the membrane part (7) with the piezoelectric layer (4) being interposed therebetween. Separately from the upper electrode (5), a heater (6) is arranged above the piezoelectric layer (4), or alternatively, at least a part of the upper electrode (5) also functions as a heater (6).
Inventors:
MOURI TAKAO (JP)
YAMAMOTO KANSHO (JP)
YAMAMOTO KANSHO (JP)
Application Number:
PCT/JP2015/065591
Publication Date:
December 17, 2015
Filing Date:
May 29, 2015
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H04R17/00; H01L41/04; H01L41/09; H01L41/113
Foreign References:
| JP2011082624A | 2011-04-21 | |||
| JPH10256570A | 1998-09-25 | |||
| JPS62239800A | 1987-10-20 |
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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