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Patent Searching and Data


Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/166120
Kind Code:
A1
Abstract:
A piezoelectric driving section (120) is formed of a plurality of layers, and is directly or indirectly supported by a base part (110). The piezoelectric driving section (120) includes a piezoelectric layer (130), an upper electrode layer (140), and a lower electrode layer (150). The upper electrode layer (140) is disposed on the upper side of the piezoelectric layer (130). The lower electrode layer (150) is disposed so as to face at least part of the upper electrode layer (140) with the piezoelectric layer (130) interposed therebetween. The piezoelectric driving section (120) is provided with a through-groove (121) vertically penetrating therethrough, whereby a pair of inner side surfaces (122) are formed. Each of the pair of inner side surfaces (122) includes a first narrow width section (123) at which the width of the through-groove (121) gradually narrows downward from an upper end surface (131) of the piezoelectric layer (130).

Inventors:
KISHIMOTO YUTAKA (JP)
IKEUCHI SHINSUKE (JP)
Application Number:
PCT/JP2019/037841
Publication Date:
August 20, 2020
Filing Date:
September 26, 2019
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17; H01L41/047; H01L41/09; H01L41/187; H01L41/257; H01L41/29; H04R17/00
Domestic Patent References:
WO2009081651A12009-07-02
Foreign References:
JP2008022305A2008-01-31
JP2007221189A2007-08-30
JP2011523828A2011-08-18
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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