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Patent Searching and Data


Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/230443
Kind Code:
A1
Abstract:
A membrane part (120) includes a single crystal piezoelectric layer (130), an upper electrode layer (140), and a lower electrode layer (150). The upper electrode layer (140) is disposed on a first surface (131). The lower electrode layer (150) is disposed on a second surface (132) so as to face at least a portion of the upper electrode layer (140) with the single crystal piezoelectric layer (130) interposed therebetween. The single crystal piezoelectric layer (130) has a plurality of piezoelectric cleavage directions (Cp), each defined as a direction that extends along a boundary between a cleavage plane that is created when the single crystal piezoelectric layer (130) is cleaved and the first surface (131). When seen from the up-down direction, at least a portion of an upper electrode outer edge (140E) which is the outer edge of the upper electrode layer (140) and at least a portion of a lower electrode outer edge (140E) which is the outer edge of the lower electrode layer (150) are positioned nonparallel to at least one direction of the plurality of piezoelectric cleavage directions (Cp).

Inventors:
SUZUKI MASAYUKI (JP)
IKEUCHI SHINSUKE (JP)
KUROKAWA FUMIYA (JP)
KISHIMOTO YUTAKA (JP)
Application Number:
PCT/JP2020/011693
Publication Date:
November 19, 2020
Filing Date:
March 17, 2020
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/047; H01L41/09; H01L41/187
Foreign References:
JP2004230790A2004-08-19
JP2009010367A2009-01-15
JP2013065940A2013-04-11
JP2016134434A2016-07-25
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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