Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/210596
Kind Code:
A1
Abstract:
The present invention is provided with a base part (110) and a laminated part (120). The base part (110) includes one main surface (111) that is a flat surface, and the other main surface (112) located on the opposite side from the one main surface (111). The laminated part (120) is laminated on the one-main-surface (111) side of the base part (110). The laminated part (120) includes a single crystal piezoelectric layer (130) and a pair of electrode layers for applying a voltage to the single crystal piezoelectric layer (130). A recess (132) is formed in a facing surface (131) of the single crystal piezoelectric layer (130), the facing surface (131) facing the one main surface (111) of the base part (110). The single crystal piezoelectric layer (130) is joined to the one main surface (111) of the base part (110) at portions of the facing surface (131) other than the recess (132).
Inventors:
KISHIMOTO YUTAKA (JP)
Application Number:
PCT/JP2021/015376
Publication Date:
October 21, 2021
Filing Date:
April 14, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/047; H01L41/187; H01L41/29; H03H9/17
Domestic Patent References:
| WO2000076066A1 | 2000-12-14 |
Foreign References:
| JP2007228356A | 2007-09-06 | |||
| JP2002009583A | 2002-01-11 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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