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Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/246443
Kind Code:
A1
Abstract:
A membrane section (Mb) is provided with a penetrating groove (180) penetrating in the vertical direction thereof. The width of the penetrating groove (180) in a single crystal piezoelectric layer (130) becomes narrower further downward in the single crystal piezoelectric layer (130). With respect to the single crystal piezoelectric layer (130) and a reinforcing layer (160), the maximum width of the penetrating groove (180) at the layer positioned on the lower side is smaller than the minimum width of the penetrating groove (180) at the layer positioned on the upper side.

Inventors:
HINO RYUNOSUKE (JP)
IKEUCHI SHINSUKE (JP)
Application Number:
PCT/JP2021/021019
Publication Date:
December 09, 2021
Filing Date:
June 02, 2021
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/04; H01L41/09; H01L41/187; H03H9/17
Domestic Patent References:
WO2020059200A12020-03-26
WO2008032543A12008-03-20
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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