Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/251159
Kind Code:
A1
Abstract:
This piezoelectric device is provided with a base part (110) and a laminate part (120). The laminate part (120) includes, at least above a recess (113), a piezoelectric layer (130) and a pair of electrode layers (140, 150) that apply voltage to the piezoelectric layer (130), and has a membrane part (Mb) which is a portion covering the recess (113). A piezoelectric membrane part (132) forming the membrane part (Mb) in the piezoelectric layer (130) bulges to the recess (113) side and/or to the side opposite to the recess (113) side.
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Inventors:
KISHI YUZO (JP)
KISHIMOTO YUTAKA (JP)
IKEUCHI SHINSUKE (JP)
KISHIMOTO YUTAKA (JP)
IKEUCHI SHINSUKE (JP)
Application Number:
PCT/JP2021/020204
Publication Date:
December 16, 2021
Filing Date:
May 27, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/047; H01L41/053; H01L41/08; H01L41/09; H02N2/04; H03H9/17
Foreign References:
| JP2000006398A | 2000-01-11 | |||
| JP2019114979A | 2019-07-11 | |||
| JP2013538446A | 2013-10-10 | |||
| JP2015507388A | 2015-03-05 | |||
| JP2013005250A | 2013-01-07 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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