PIEZOELECTRIC DEVICE - MURATA MANUFACTURING CO

Title:

PIEZOELECTRIC DEVICE

Document Type and Number:

WIPO Patent Application WO/2023/139839

Kind Code:

A1

Abstract:

A piezoelectric device (101) comprises: a base part (10) having an opening (9); and a vibration layer (12) disposed on the upper side of the base part (10). The vibration layer (12) has a fixation part (41) fixed to the base part (10) and a membrane part (42) which is contiguous to the fixation part (41) and extends above the opening (9). The vibration layer (12) has a lower electrode layer (3) connected to the base part (10), a piezoelectric layer (4) disposed on the upper side of the lower electrode layer (3), and an upper electrode layer (5) disposed on the upper side of the piezoelectric layer (4). In at least a partial region of the membrane part (42), the upper electrode layer (5) and the lower electrode layer (3) sandwich the piezoelectric layer (4). The piezoelectric device (101) further comprises: a first pad electrode (31) disposed on the upper side of the upper electrode layer (5) so as to be electrically connected to the upper electrode layer (5); a second pad electrode disposed on the upper side of the lower electrode layer (3) so as to be electrically connected to the lower electrode layer (3) without the piezoelectric layer (4) therebetween: and a first conductor layer (35) disposed above the lower electrode layer (3) so as to be separated from the first pad electrode (31) and/or the second pad electrode.

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Inventors:

SAWAMURA MAKOTO (JP)
NIWA RYOSUKE (JP)
IKEUCHI SHINSUKE (JP)

Application Number:

PCT/JP2022/033757

Publication Date:

July 27, 2023

Filing Date:

September 08, 2022

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)

International Classes:

H03H9/17; H10N30/06; H10N30/20; H10N30/87

Domestic Patent References:

WO2015190429A1

2015-12-17

Foreign References:

JP2009038518A	2009-02-19
JP2007274660A	2007-10-18
JP2019201400A	2019-11-21
JP2005303573A	2005-10-27
JP2011031385A	2011-02-17

Attorney, Agent or Firm:

FUKAMI PATENT OFFICE, P.C. (JP)

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