Title:
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2021/131311
Kind Code:
A1
Abstract:
A piezoelectric element comprising a support body and a vibration part (20) disposed on the support body, the vibration part (20) comprising a piezoelectric film and an electrode film connected to the piezoelectric film to extract electric charge generated by deformation of the piezoelectric film. The vibration part (20) has a support region (21a) supported by the support body, and a plurality of vibration regions (22) connected to the support region (21a) and floating from the support body, and outputs a pressure detection signal based on the electric charge. The electrode film is formed in a first region (R1). Further, an improvement part (22) for improving the accuracy of detecting the pressure detection signal is formed.
Inventors:
MAWATARI KAZUAKI (JP)
SAKAI MINEKAZU (JP)
KOYAMA YUUJI (JP)
SAKAI MINEKAZU (JP)
KOYAMA YUUJI (JP)
Application Number:
PCT/JP2020/040471
Publication Date:
July 01, 2021
Filing Date:
October 28, 2020
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
B81B3/00; H01L41/047; H01L41/053; H01L41/083; H01L41/113; H01L41/187; H01L41/293; H01L41/311; H04R17/02; H04R31/00
Foreign References:
| JP2018137297A | 2018-08-30 | |||
| JP2005340961A | 2005-12-08 | |||
| JP2017220935A | 2017-12-14 | |||
| JP2018170697A | 2018-11-01 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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