Title:
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/168826
Kind Code:
A1
Abstract:
This piezoelectric element comprises a support (10) and a vibrating portion (20) disposed on the support (10). The vibrating portion (20) includes a piezoelectric film (50) and an electrode film (60) connected to the piezoelectric film (50) to extract charge generated by deformation of the piezoelectric film (50). The vibrating portion (20) comprises a support region (21a) supported on the support (10), and a vibration region (22) connected to the support region (21a) and floating above the support (10). The vibrating portion (20) outputs a pressure detection signal based on the charge. The vibration region (22) has a plurality of slits formed from the support region (21a) side toward the center (C) of the vibration region (22), and is in a state of being supported on both sides with respect to the support region (21a).
Inventors:
SAKAI MINEKAZU (JP)
MAWATARI KAZUAKI (JP)
KOYAMA YUJI (JP)
TANAKA MASAAKI (JP)
JOMORI TOMOYA (JP)
SHIMIZU YUHEI (JP)
MAWATARI KAZUAKI (JP)
KOYAMA YUJI (JP)
TANAKA MASAAKI (JP)
JOMORI TOMOYA (JP)
SHIMIZU YUHEI (JP)
Application Number:
PCT/JP2022/003806
Publication Date:
August 11, 2022
Filing Date:
February 01, 2022
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
H04R1/02; H01L41/053; H01L41/113; H01L41/187; H01L41/332; H04R17/02
Domestic Patent References:
| WO2020121609A1 | 2020-06-18 |
Foreign References:
| JP2018041788A | 2018-03-15 | |||
| JP2020178109A | 2020-10-29 | |||
| JP2009100178A | 2009-05-07 | |||
| JP2011004129A | 2011-01-06 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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