Title:
PIEZOELECTRIC-ELEMENT-DRIVEN VALVE AND FLOW RATE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/123852
Kind Code:
A1
Abstract:
[Solution] This piezoelectric-element-driven valve is provided with a valve seat provided on a flow channel, a valve body that separates from/sits on the valve seat, and a piezoelectric element, and is configured so that the valve body is moved by the extension of the piezoelectric element. The piezoelectric-element-driven valve also is provided with a detection mechanism for detecting the amount by which the piezoelectric element extends, the detection mechanism including a distortion sensor, and the movement amount of the valve body being detectable from the output of the distortion sensor.
Inventors:
DOHI RYOUSUKE (JP)
HIRATA KAORU (JP)
SUGITA KATSUYUKI (JP)
KAWADA KOJI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
HIRATA KAORU (JP)
SUGITA KATSUYUKI (JP)
KAWADA KOJI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2017/046094
Publication Date:
July 05, 2018
Filing Date:
December 22, 2017
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K31/02; F16K37/00; G05D7/06
Foreign References:
| JP2008008356A | 2008-01-17 | |||
| JP2013228950A | 2013-11-07 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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