Title:
PIEZOELECTRIC ELEMENT-DRIVEN VALVE AND FLOW VOLUME CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/159959
Kind Code:
A1
Abstract:
Provided is a piezoelectric element-driven valve 100 configured to be able to control a fluid having a temperature exceeding a use range temperature of a piezoelectric actuator. The piezoelectric element-driven valve 100 comprises: a piezoelectric element 10b for causing a valve body 2 to be separated from or seated on a valve seat 5; a heat-insulating spacer 40 disposed between the valve body 2 and the piezoelectric element 10b; and a distortion sensor 20 fixed to the piezoelectric element 10b. The heat-insulating spacer 40 has a plurality of holes 40H penetrating therethrough in a direction intersecting a stacking direction D1 of the heat-insulating spacer 40 and the piezoelectric element 10b.
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Inventors:
DOHI RYOUSUKE (JP)
SUGITA KATSUYUKI (JP)
HIRATA KAORU (JP)
KAWADA KOJI (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
SUGITA KATSUYUKI (JP)
HIRATA KAORU (JP)
KAWADA KOJI (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
Application Number:
PCT/JP2019/005082
Publication Date:
August 22, 2019
Filing Date:
February 13, 2019
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K49/00; F16K31/02; F16K37/00; G05D7/06; H01L41/083; H01L41/09; H02N2/06
Foreign References:
| JP2011117499A | 2011-06-16 | |||
| JPS5318388A | 1978-02-20 | |||
| JP2004162733A | 2004-06-10 | |||
| JPH0211979A | 1990-01-17 | |||
| JP2016138844A | 2016-08-04 | |||
| JP2004156720A | 2004-06-03 |
Attorney, Agent or Firm:
TANIDA Ryuichi (JP)
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