Title:
PIEZOELECTRIC ELEMENT AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/070851
Kind Code:
A1
Abstract:
A piezoelectric element according to the present invention comprises a first electrode, a piezoelectric layer containing a piezoelectric material doped with a metallic element, and a second electrode such that the first electrode, the piezoelectric layer, and the second electrode are stacked in this order on a support substrate. The piezoelectric layer includes a first piezoelectric layer and a second piezoelectric layer. The second piezoelectric layer is provided on at least one of the top surface and the undersurface of the first piezoelectric layer and contains the metallic element with a lower concentration than the concentration of the metallic element contained in the first piezoelectric layer.
Inventors:
TSUBURAOKA GAKU (JP)
NAKAMURA DAISUKE (JP)
AOKI YUZUKI (JP)
NAKAI TAKAHIRO (JP)
NAKAMURA DAISUKE (JP)
AOKI YUZUKI (JP)
NAKAI TAKAHIRO (JP)
Application Number:
PCT/JP2023/034111
Publication Date:
April 04, 2024
Filing Date:
September 20, 2023
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H10N30/853; H03H9/17; H10N30/06; H10N30/20; H10N30/30; H10N30/87
Foreign References:
| JP2020057762A | 2020-04-09 | |||
| JP2022085074A | 2022-06-08 | |||
| JP2005260964A | 2005-09-22 | |||
| JP2020057785A | 2020-04-09 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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