PIEZOELECTRIC ELEMENT, METHOD FOR MANUFACTURING SAME, ACTUATOR, AND LIQUID DISCHARGE DEVICE

Title:

PIEZOELECTRIC ELEMENT, METHOD FOR MANUFACTURING SAME, ACTUATOR, AND LIQUID DISCHARGE DEVICE

Document Type and Number:

WIPO Patent Application WO/2016/051644

Kind Code:

A1

Abstract:

[Problem] To provide: a lead zirconate titanate (PZT) piezoelectric element with high adhesiveness between a substrate and a lower electrode, high adhesiveness between the lower electrode and a piezoelectric film, and outstanding long-term drive reliability; a method for manufacturing such piezoelectric element; and an actuator and a liquid discharge device using this piezoelectric element. [Solution] A piezoelectric element (1) is provided with a titanium-containing adhesive layer (20), a lower electrode (30), a PZT piezoelectric film (40), and an upper electrode (50) in that order on a silicon substrate (10). The lower electrode (30) contains: a columnar structure film comprising numerous columnar crystals (30c) having as a principal constituent a platinum-group element obtained as a result of growing from the surface of the titanium-containing adhesive layer (20); and an adhesive layer constituent diffused from the titanium adhesive layer (20) and oxygen diffused from the piezoelectric film (40) side, both the adhesive layer constituent and the oxygen being present in the columnar structure film. The column diameters of the columnar crystals of the columnar structure film are mainly in the range of 50-200 nm.

More Like This:

JP5531653	Piezoelectric thin film device, its manufacturing method and piezoelectric thin film device
WO/2018/110483	PIEZOELECTRIC FUNCTIONAL FILM, ACTUATOR, AND INK-JET HEAD
JP4754803	Acoustic coupling transformer with reverse c-axis piezoelectric element

Inventors:

FUJII TAKAMICHI (JP)
KASAHARA TAKEHIRO (JP)

Application Number:

PCT/JP2015/004060

Publication Date:

April 07, 2016

Filing Date:

August 17, 2015

Export Citation:

Click for automatic bibliography generation Help

Assignee:

FUJIFILM CORP (JP)

International Classes:

H01L41/319; B41J2/14; B41J2/16; C04B35/493; C23C14/08; H01L41/047; H01L41/09; H01L41/29; H01L41/316; H02N2/00

Foreign References:

JP2009113419A	2009-05-28
JP2007281049A	2007-10-25
JP2013197522A	2013-09-30

Attorney, Agent or Firm:

YANAGIDA, Masashi et al. (JP)
Seiji Yanagida (JP)

Download PDF:

View/Download PDF PDF Help

Previous Patent: VIDEO CODING DEVICE, VIDEO DECODING DEVICE, VIDEO CODING METHOD, VIDEO DECODING METHOD AND PROGRAM

Next Patent: FLEXIBLE BATTERY