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Title:
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC MICROPHONE, PIEZOELECTRIC RESONATOR AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2017/094520
Kind Code:
A1
Abstract:
Provided is a bimorph piezoelectric element, with which the directions of the polarization axes of adjacent piezoelectric layers can be controlled with high precision. This piezoelectric element 1 comprises: a first piezoelectric layer 4, which is made of AlN and has a first polarization axis direction P1 in the thickness direction; a second piezoelectric layer 5, which is made of GeAlN, and which is deposited on the first piezoelectric layer 4, and has a second polarization axis direction P2, which is a direction opposite to the first polarization axis direction P1; a first electrode 3a provided on the side opposite to the second piezoelectric layer 5 side of the first piezoelectric layer 4; and a second electrode 3b provided on the side opposite to the first piezoelectric layer 4 side of the second piezoelectric layer 5.

Inventors:
UMEDA, Keiichi (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
MIZUNO, Takaaki (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2016/084132
Publication Date:
June 08, 2017
Filing Date:
November 17, 2016
Export Citation:
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Assignee:
MURATA MANUFACTURING CO., LTD. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
H01L41/187; H01L41/09; H01L41/113; H01L41/257; H01L41/316; H03H9/17; H04R17/02; H04R31/00
Domestic Patent References:
WO2015133422A12015-09-11
WO2016104004A12016-06-30
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (Chuo Odori FN Bldg, 3-8 Tokiwamachi 1-chome, Chuo-ku, Osaka-sh, Osaka 28, 〒5400028, JP)
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