Title:
PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2013/164955
Kind Code:
A1
Abstract:
Disclosed is a piezoelectric element wherein a lower electrode composed of Pt, a buffer layer composed of PLT, and a piezoelectric thin film as a perovskite-type ferroelectric thin film are formed in this order on a substrate. The average crystal grain size of Pt constituting the lower electrode is 50-150 nm.
Inventors:
EGUCHI HIDEYUKI (JP)
Application Number:
PCT/JP2013/061568
Publication Date:
November 07, 2013
Filing Date:
April 19, 2013
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
H01L41/09; B41J2/16; H01L41/18; H01L41/187; H01L41/22
Domestic Patent References:
| WO2012039266A1 | 2012-03-29 |
Foreign References:
| JP2004047928A | 2004-02-12 | |||
| JP2007308782A | 2007-11-29 | |||
| JP2000299513A | 2000-10-24 | |||
| JP4058018B2 | 2008-03-05 |
Other References:
See also references of EP 2846370A4
Attorney, Agent or Firm:
SANO SHIZUO (JP)
Shizuo Sano (JP)
Shizuo Sano (JP)
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