Title:
PIEZOELECTRIC FILM, PIEZOELECTRIC ELEMENT AND METHOD FOR PRODUCING PIEZOELECTRIC FILM
Document Type and Number:
WIPO Patent Application WO/2022/202381
Kind Code:
A1
Abstract:
The present invention provides: a piezoelectric film which has achieved a good balance between high withstand voltage and long-term reliability; a piezoelectric element; and a method for producing a piezoelectric film. A piezoelectric film which is mainly composed of a perovskite oxide, while having two local maximum values in a current-voltage profile that shows the relationship between the voltage, which is acquired in a case where the piezoelectric film is sandwiched between a pair of electrode layers and a sweeping voltage from -40 V to +40 V is applied thereto at a first change rate of 10 kV/cm·sec, and the current that flows when the voltage is applied thereto.
Inventors:
NAKAMURA SEIGO (JP)
KOBAYASHI HIROYUKI (JP)
KOBAYASHI HIROYUKI (JP)
Application Number:
PCT/JP2022/010718
Publication Date:
September 29, 2022
Filing Date:
March 10, 2022
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B41J2/14; H01L41/187; C23C14/34; H01L41/047; H01L41/29; H01L41/316
Foreign References:
| JP2008266770A | 2008-11-06 | |||
| JP2008306164A | 2008-12-18 | |||
| JP2008311634A | 2008-12-25 | |||
| JP2019021701A | 2019-02-07 | |||
| JP2010016011A | 2010-01-21 | |||
| JP2009057599A | 2009-03-19 | |||
| JP2021051660A | 2021-04-01 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
Download PDF:
Previous Patent: INSPECTION CARTRIDGE
Next Patent: METHOD FOR MANUFACTURING PACKAGED MEDICINE ADMINISTERING TOOL
Next Patent: METHOD FOR MANUFACTURING PACKAGED MEDICINE ADMINISTERING TOOL