Title:
PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT PROVIDED WITH SAME, AND LIQUID DISCHARGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/084365
Kind Code:
A1
Abstract:
[Problem] To provide a piezoelectric film having high piezoelectric characteristics, a piezoelectric element provided with the piezoelectric film, and a liquid discharge device. [Solution] This piezoelectric film is formed by a vapor-phase growth method, and includes a perovskite-type oxide obtained by doping a perovskite-type oxide represented by general formula P with 0.2 mol% to 0.5 mol% of Si, the ratio of the peak intensity of a pyrochlore phase with respect to the combined total of the peak intensities in each of the (100), (001), (110), (101), and (111) plane directions being 0.25 or less. General formula P: A1+δ[(ZrxTi1-x)1-aNba]Oy (In formula P, A is an A-site element having Pb as a primary component, and Zr, Ti, and Nb are B-site elements, x is greater than 0 and less than 1, and a is at least 0.1 and less than 0.3.)
Inventors:
MURAKAMI NAOKI (JP)
Application Number:
PCT/JP2015/005839
Publication Date:
June 02, 2016
Filing Date:
November 24, 2015
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L41/187; C01G33/00; C04B35/493; C23C14/08; H01L41/09; H01L41/316
Foreign References:
| JP2009221037A | 2009-10-01 | |||
| JP2011040644A | 2011-02-24 | |||
| JP2009293130A | 2009-12-17 |
Attorney, Agent or Firm:
YANAGIDA, Masashi et al. (JP)
Seiji Yanagida (JP)
Seiji Yanagida (JP)
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